Optimization designed large stroke MEMS micromirror for adaptive optics

A novel micromirror based on the PolyMUMPs process is designed and presented. The hexagonal micromirror with a diameter of 450 μm consists of three supporting bilayer cantilevers and a mirror plate. The bilayer cantilevers, formed with a polysilicon layer and a gold layer, elevate the mirror plate according to residual stress-induced bending. Both analytical and finite element analysis (FEA) models are built to calculate the elevated height of the free end of the cantilever. The analytical solut