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Non contact thickness measurement for ultra thin metal foils with differential w

上传者: 2021-02-25 06:30:39上传 PDF文件 222.73KB 热度 17次
A new differential white light interference technique for the thickness measurements of metal foil is presented. In this work, the differential white light system consists of two Michelson interferometers in tandem, and the measured reflective surfaces are the corresponding surfaces of metal foil. T
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