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Atomic layer deposition for industrial optical coatings

上传者: 2021-02-24 04:08:22上传 PDF文件 2.31MB 热度 17次
Atomic layer deposition (ALD) is under active research for its many emerging applications. In the optical field, ALD opens fundamentally new research paths, providing extreme conformality and capacity to engineer new materials. ALD enables coatings which are undoable or difficult through physical va
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