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Comparative Study on MOCVD Growth of a Plane GaN Films on r Plane Sapphire Subst

上传者: 2021-02-22 16:58:32上传 PDF文件 276.6KB 热度 9次
Comparative Study on MOCVD Growth of a-Plane GaN Films on r-Plane Sapphire Substrates Using GaN, AlGaN, and AlN Buffer Layers
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