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Image lithography in telluride suboxide thin film through controlling “virtual”

上传者: 2021-02-16 23:28:58上传 PDF文件 809.61KB 热度 16次
In this work, TeO0.7 thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-scale patterns were successfully fabricated on TeO0.7 thin films through the laser direct writing method. The structural origin of TeO0.7 thin film was investigated for gray-scale patt
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