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  4. Method for simultaneously and directly measuring all six DOF motion errors of a

Method for simultaneously and directly measuring all six DOF motion errors of a

上传者: 2021-02-09 09:13:14上传 PDF文件 594.85KB 热度 11次
We report a method for simultaneously and directly measuring all six-degrees-of-freedom (six-DOF) motion errors of a rotary axis. Such a method combines the principles of laser interferometry and laser collimation measurement. One reference rotary axis and two retro-reflectors are used to achieve si
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