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Wide aperture piezoceramic deformable mirrors for aberration correction in high

上传者: 2021-02-08 14:35:12上传 PDF文件 1.18MB 热度 16次
The deformable mirror with the size of 410 mm468 mm controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this p
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