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Study on evaluation of RB SiC aspherical mirror high frequency surface quality f

上传者: 2021-02-07 22:19:19上传 PDF文件 1.4MB 热度 23次
The issue of the letter is focused on the RB-SiC aspherical mirror high frequency surface quality which is fabricated with the different type fixed abrasive pellets. The two-dimensional (2D) surface roughness of the mirror is simulated and experimented. The errors between the simulation and the expe
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