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Crystalline carbonitride formation is harder than the hexagonal Si carbonitride

上传者: 2020-07-17 17:35:34上传 PDF文件 201.57KB 热度 8次
SiCN and CN 晶体薄膜的形成,孙长庆,,t is shown that large and well-faceted hexagonal crystallites can grow on Si and Ti substrates under higher nitrogen gas-flow in the gases mixture of CH4 and H2 in the normal proce
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