taurus_tsuprem4_vH_2013.03.rar

TSUPREM-4isacomputerprogramforsimulatingtheprocessingstepsusedinthemanufactureofsiliconintegratedcircuitsanddiscretedevices.TSUPREM-4simulatestheincorporationandredistributionofimpuritiesinatwo-dimensional(2-D)devicecross-sectionperpendiculartothesurfaceofthe