Advanced Mechatronics and MEMS Devices II 2017.pdf
SpringerInternationalPublishingSwitzerland2017
Thisbookconsistsof30chapters.Chapter1presentsthetheoryandapplication
ofactuationofelastomericmicro-devicesviacapillaryforcetechnology.
Chapter2providesinsightintothefundamentaldesign,workingprinciples,and
practicalgui
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