Lithography Process Control_by Harry J. Levinson

Tounderstandthistexttherearesomeprerequisites.Abasicfoundationinlithographyscienceisassumed.TheSPIEHandbookonMicrolithography,MicromachiningandMicrofabrication.Volume1:Microlithographylprovidesasuitableintroduction.Itisalsoassumedthatthereaderhashadsomeintroductiontobasicstatisticalconce