a MEMS-IDT gyroscope

Thedesign,developmentandperformanceevaluationofanovelradiofrequency microelectromechanicalsystems(MEMS)gyroscope,basedonasurfaceacousticwave resonator(SAWR)andasurfaceacousticwavesensorispresentedinthispaper.Mostofthe MEMSgyroscopesbasedonsiliconvibratorystructuresthatutilizetheenergytransfer betweenthetwovibratorymodesdemandsmallfabricationtolerancestominimizesignal outputwhenthereisnorotation(i.e.zerorateoutput).This1cm × 1cmgyroscopeoperates basedontheprincipleofasurfaceacousticwave(SAW)onapiezoelectricsubstrate.The SAWRcreat esSAWstandingwaveswithinthecavityspacebetweentheinterdigital transducers(IDTs).Theparticlesattheanti-nodesofastandingwaveexperiencelarge amplitudesofvibrationperpendiculartotheplaneofthesubstrate,whichservesasthe referencevibratingmotionforthisgyroscope.